IRDS: Metrology - George Orji at INC 2019

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  • #ICRC
  • #2019
  • #Rebooting Computing
  • #INC
  • #Grenoble
  • #France
  • #computing
  • #technology
  • #devices
  • #systems
  • #planning
  • #forecasting
  • #roadmap
  • #metrology
  • #research
  • #new materials
  • #device structures
  • #hybrid metrology
  • #data analytics
  • #3D NAND
  • #nanowire
  • #nanosheet
  • #lithography
  • #xray ptychography
  • #electron ptychography
  • #SAXS
  • #OSC
  • #Moores Law
  • #EUV stochastics

George Orji, National Institute of Standards and Technology (NIST), shares the mission and scope of the metrology working group that is focused on identifying metrology requirements, materials, and research needed in the next 15 years. Orji looks at the impact of new device structures, new materials and the plans for 2019, including cross-chapter collaboration.

  • Published on
  • June 24, 2019

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