Micro Pillar Support Structure for Mechanical Reliability of Silicon Ultra-Thin Vapor Chambers

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#micro-channel cooling #silicon vapor chamber #vapor pressure #reliability #electronics cooling

(15:40 + Q&A) Farid Soroush, Stanford University, presented at the 2021 REPP Symposium.

The bare cavity design in conventional vapor chambers is not capable of providing the required mechanical reliability. An array of silicon micro pillars increases the mechanical reliability of a silicon vapor chamber under high operating pressure and chip bonding pressure. A numerical model for the mechanical stress analysis of the device is developed, mesh independence has been studied, and 4 design iterations have been investigated. The critical point of the final design is found.

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(15:40 + Q&A) Farid Soroush, Stanford University, presented at the 2021 REPP Symposium.

The bare cavity design in conventional vapor chambers is not capable of providing the required mechanical reliability. An array of silicon micro pillars increases the mechanical reliability of a silicon vapor chamber under high operating pressure ....

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