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IITC 2020 Session 9A Poster Session: 9.1 Grain Boundary Scattering in Ru and Cu Interconnects

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EDS IITC 2020 Conference

EDS IITC 2020 Conference Video

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IITC 2020 Session 9A Poster Session: 9.1 Grain Boundary Scattering in Ru and Cu Interconnects

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