Reliability Optimization of Open Trench Undercuts Silicon Photonic Tuner Heater

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(22:55 + Q&A) Alexey Vert, PsiQuantum — This talk investigates the design and implementation of a silicon photonic thermo-optic phase shifter based on tunable SiN-based Mach-Zehnder interferometer optimized for low power consumption and reliability. The proposed device achieves phase tuning with a P? of 15mW at room temperature and 12.5mW at cryogenic temperatures, making it highly efficient for integration into photonic circuits, particularly in quantum photonics and quantum computing applications. The design leverages advanced thermal management techniques, including open trench undercuts, heater membrane thinning, and engineered heater contacts, to enhance both efficiency and reliability. Additionally, this silicon photonics platform is optimized for low optical propagation and insertion losses, maintaining a small footprint while providing efficient optical phase modulation. Our reliability study addresses the tradeoff of maximum heater element temperature, reporting on the lifetime optimization of the heater structure for modulating the refractive index of SiN waveguides. Simulations of thermo-electric performance and estimations of lifetime-limiting effects, such as heater element degradation and metal lines wear-out due to electro-migration stress, further validate the effectiveness of the proposed approach. This work represents a significant step towards the development of energy-efficient and reliable silicon photonic devices for next-generation quantum and optical communication systems.
Bio: Alexey Vert received the M.S. degree in applied physics and mathematics from Moscow Institute of Physics and Technology in 2000. He received his Ph.D degree in electrical and computer engineering in 2004 from Cornell University. He joined PsiQuantum Corporation in 2020 and has been involved in silicon photonics technology development for PsiQuantum’s quantum computing systems. His main research interests are in design, fabrication and reliability of silicon photonics components. 

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(22:55 + Q&A) Alexey Vert, PsiQuantum — This talk investigates the design and implementation of a silicon photonic thermo-optic phase shifter based on tunable SiN-based Mach-Zehnder interferometer optimized for low power consumption and reliability. The proposed device achieves phase tuning with a Pπ of 15mW at room temperature and 12.5mW at cryogenic temperatures, making it highly efficient… (more)

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